Sensing Rogue Particles with Optical Scattering

Larry Fabiny

As semiconductor wafers and other optoelectronic devices grow smaller, the detection of microscopic dust and other particles prior to manufacturing becomes increasingly important. Fabiny looks inside an optical sensor that is cleaning up this industry.

Log in or become a member to view the full text of this article.


This article may be available for purchase via the search at Optica Publishing Group.
Optica Members get the full text of Optics & Photonics News, plus a variety of other member benefits.

Add a Comment