Functional Imaging

D.T. Reid, E. Ramsay and K.Wilsher

Three-Dimensional Imaging of Diffusion Volumes in Silicon Circuits by Use of the Two- Photon Optical-Beam- Induced Current Effect

Log in or become a member to view the full text of this article.


This article may be available for purchase via the search at Optica Publishing Group.
Optica Members get the full text of Optics & Photonics News, plus a variety of other member benefits.

Add a Comment