Optics & Photonics News Magazine
May, 1983 Issue
May, 1983 Issue
Feature Articles
New laser semiconductor processing techniques offer hope for future integrated circuits
As microcircuits become smaller and more complex, and as competition among suppliers continues to heat up, manufacturers are considering broader roles for lasers in fabrication and process diagnostics. They are intrigued by the prospects of having available vast numbers of short-wavelength photons and a selection of high powers at a variety of wavelengths for selective photochemistry.
by Howard Rausch